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Propylene glycol monomethyl ether acetate (PGMEA/PMA), also known as propylene glycol methyl ether acetate, is a colorless hygroscopic liquid with a unique odor. It is a non-polluting solvent with multi-functional groups. Its molecular formula is C6H12O3. Not only it is used as a solvent for printing ink, paint, ink, textile dyes and textile oil, it is also used as a cleaning agent in the production of liquid crystal displays. PGMEA/PMA is flammable, and when the temperature is above 42°C, it may form explosive vapor/air mixture.
In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers. The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms, due to its evaporation into ambient air.
